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@ARTICLE{Lehmann:134555,
      author       = {Lehmann, J. and Hübner, R. and Borany, J.V. and Skorupa,
                      W. and Mikolajick, T. and Schäfer, A. and Schubert, Jürgen
                      and Mantl, S.},
      title        = {{M}illisecond flash lamp annealing for {L}a{L}u{O}3 and
                      {L}a{S}c{O}3 high-k dielectrics},
      journal      = {Microelectronic engineering},
      volume       = {109},
      issn         = {0167-9317},
      address      = {[S.l.] @},
      publisher    = {Elsevier},
      reportid     = {FZJ-2013-02688},
      pages        = {381 - 384},
      year         = {2013},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {620},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000321229200096},
      doi          = {10.1016/j.mee.2013.04.021},
      url          = {https://juser.fz-juelich.de/record/134555},
}