Home > Publications database > Millisecond flash lamp annealing for LaLuO3 and LaScO3 high-k dielectrics > print

001     134555
005     20210129211703.0
024 7 _ |a 10.1016/j.mee.2013.04.021
|2 doi
024 7 _ |a 0167-9317
|2 ISSN
024 7 _ |a 1873-5568
|2 ISSN
024 7 _ |a WOS:000321229200096
|2 WOS
024 7 _ |a altmetric:1422995
|2 altmetric
037 _ _ |a FZJ-2013-02688
082 _ _ |a 620
100 1 _ |a Lehmann, J.
|0 P:(DE-HGF)0
|b 0
|e Corresponding author
245 _ _ |a Millisecond flash lamp annealing for LaLuO3 and LaScO3 high-k dielectrics
260 _ _ |a [S.l.] @
|c 2013
|b Elsevier
336 7 _ |a Journal Article
|b journal
|m journal
|0 PUB:(DE-HGF)16
|s 1372058241_10735
|2 PUB:(DE-HGF)
336 7 _ |a Output Types/Journal article
|2 DataCite
336 7 _ |a Journal Article
|0 0
|2 EndNote
336 7 _ |a ARTICLE
|2 BibTeX
336 7 _ |a JOURNAL_ARTICLE
|2 ORCID
336 7 _ |a article
|2 DRIVER
500 _ _ |3 POF3_Assignment on 2016-02-29
536 _ _ |a 421 - Frontiers of charge based Electronics (POF2-421)
|0 G:(DE-HGF)POF2-421
|c POF2-421
|x 0
|f POF II
588 _ _ |a Dataset connected to CrossRef, juser.fz-juelich.de
700 1 _ |a Hübner, R.
|0 P:(DE-HGF)0
|b 1
700 1 _ |a Borany, J.V.
|0 P:(DE-HGF)0
|b 2
700 1 _ |a Skorupa, W.
|0 P:(DE-HGF)0
|b 3
700 1 _ |a Mikolajick, T.
|0 P:(DE-HGF)0
|b 4
700 1 _ |a Schäfer, A.
|0 P:(DE-Juel1)144017
|b 5
|u fzj
700 1 _ |a Schubert, Jürgen
|0 P:(DE-Juel1)128631
|b 6
|u fzj
700 1 _ |a Mantl, S.
|0 P:(DE-Juel1)128609
|b 7
|u fzj
773 _ _ |a 10.1016/j.mee.2013.04.021
|g Vol. 109, p. 381 - 384
|0 PERI:(DE-600)1497065-x
|p 381 - 384
|t Microelectronic engineering
|v 109
|y 2013
|x 0167-9317
856 4 _ |u https://juser.fz-juelich.de/record/134555/files/FZJ-2013-02688.pdf
|y Restricted
909 C O |o oai:juser.fz-juelich.de:134555
|p VDB
910 1 _ |a Forschungszentrum Jülich GmbH
|0 I:(DE-588b)5008462-8
|k FZJ
|b 5
|6 P:(DE-Juel1)144017
910 1 _ |a Forschungszentrum Jülich GmbH
|0 I:(DE-588b)5008462-8
|k FZJ
|b 6
|6 P:(DE-Juel1)128631
910 1 _ |a Forschungszentrum Jülich GmbH
|0 I:(DE-588b)5008462-8
|k FZJ
|b 7
|6 P:(DE-Juel1)128609
913 2 _ |a DE-HGF
|b Key Technologies
|l Future Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)
|1 G:(DE-HGF)POF3-520
|0 G:(DE-HGF)POF3-529H
|2 G:(DE-HGF)POF3-500
|v Addenda
|x 0
913 1 _ |a DE-HGF
|b Schlüsseltechnologien
|1 G:(DE-HGF)POF2-420
|0 G:(DE-HGF)POF2-421
|2 G:(DE-HGF)POF2-400
|v Frontiers of charge based Electronics
|x 0
|4 G:(DE-HGF)POF
|3 G:(DE-HGF)POF2
|l Grundlagen zukünftiger Informationstechnologien
914 1 _ |y 2013
915 _ _ |a JCR/ISI refereed
|0 StatID:(DE-HGF)0010
|2 StatID
915 _ _ |a JCR
|0 StatID:(DE-HGF)0100
|2 StatID
915 _ _ |a WoS
|0 StatID:(DE-HGF)0110
|2 StatID
|b Science Citation Index
915 _ _ |a WoS
|0 StatID:(DE-HGF)0111
|2 StatID
|b Science Citation Index Expanded
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0150
|2 StatID
|b Web of Science Core Collection
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0199
|2 StatID
|b Thomson Reuters Master Journal List
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0200
|2 StatID
|b SCOPUS
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0300
|2 StatID
|b Medline
915 _ _ |a Nationallizenz
|0 StatID:(DE-HGF)0420
|2 StatID
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)1030
|2 StatID
|b Current Contents - Life Sciences
920 _ _ |l yes
920 1 _ |0 I:(DE-Juel1)PGI-9-20110106
|k PGI-9
|l Halbleiter-Nanoelektronik
|x 0
920 1 _ |0 I:(DE-82)080009_20140620
|k JARA-FIT
|l JARA-FIT
|x 1
980 _ _ |a journal
980 _ _ |a VDB
980 _ _ |a UNRESTRICTED
980 _ _ |a I:(DE-Juel1)PGI-9-20110106
980 _ _ |a I:(DE-82)080009_20140620

LibraryCollectionCLSMajorCLSMinorLanguageAuthor
Marc 21