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000135161 1001_ $$0P:(DE-Juel1)141652$$aMichard, Stephan$$b0$$ufzj
000135161 245__ $$aHigh deposition rate processes for the fabrication of microcrystalline silicon thin films
000135161 260__ $$aNew York, NY [u.a.]$$bElsevier$$c2013
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000135161 7001_ $$0P:(DE-Juel1)130830$$aMeier, Matthias$$b1$$eCorresponding author$$ufzj
000135161 7001_ $$0P:(DE-Juel1)140348$$aGrootoonk, B.$$b2$$ufzj
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000135161 773__ $$0PERI:(DE-600)1492109-1$$a10.1016/j.mseb.2012.11.020$$gVol. 178, no. 9, p. 691 - 694$$n9$$p691 - 694$$tMaterials science and engineering / B$$v178$$x0921-5107$$y2013
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