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037 _ _ |a FZJ-2013-03128
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100 1 _ |a Michard, Stephan
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245 _ _ |a High deposition rate processes for the fabrication of microcrystalline silicon thin films
260 _ _ |a New York, NY [u.a.]
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536 _ _ |a FAST TRACK - Accelerated development and prototyping of nano-technology-based high-efficiency thin-film silicon solar modules (283501)
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700 1 _ |a Meier, Matthias
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700 1 _ |a Grootoonk, B.
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700 1 _ |a Astakhov, O.
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700 1 _ |a Gordijn, A.
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700 1 _ |a Finger, F.
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773 _ _ |a 10.1016/j.mseb.2012.11.020
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