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001     135161
005     20240712084535.0
024 7 _ |a 10.1016/j.mseb.2012.11.020
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024 7 _ |a 0921-5107
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024 7 _ |a 1873-4944
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024 7 _ |a WOS:000318581800026
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037 _ _ |a FZJ-2013-03128
082 _ _ |a 600
100 1 _ |a Michard, Stephan
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245 _ _ |a High deposition rate processes for the fabrication of microcrystalline silicon thin films
260 _ _ |a New York, NY [u.a.]
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336 7 _ |a Journal Article
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536 _ _ |a 111 - Thin Film Photovoltaics (POF2-111)
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536 _ _ |a FAST TRACK - Accelerated development and prototyping of nano-technology-based high-efficiency thin-film silicon solar modules (283501)
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536 _ _ |0 G:(DE-Juel1)HITEC-20170406
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700 1 _ |a Meier, Matthias
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700 1 _ |a Grootoonk, B.
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700 1 _ |a Astakhov, O.
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700 1 _ |a Gordijn, A.
|0 P:(DE-Juel1)130242
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700 1 _ |a Finger, F.
|0 P:(DE-Juel1)130238
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773 _ _ |a 10.1016/j.mseb.2012.11.020
|g Vol. 178, no. 9, p. 691 - 694
|p 691 - 694
|n 9
|0 PERI:(DE-600)1492109-1
|t Materials science and engineering / B
|v 178
|y 2013
|x 0921-5107
856 4 _ |u https://juser.fz-juelich.de/record/135161/files/FZJ-2013-03128.pdf
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913 2 _ |a DE-HGF
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914 1 _ |y 2013
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