000135162 001__ 135162
000135162 005__ 20240712084535.0
000135162 0247_ $$2doi$$a10.1002/pip.2382
000135162 0247_ $$2ISSN$$a1099-159X
000135162 0247_ $$2ISSN$$a1062-7995
000135162 0247_ $$2WOS$$aWOS:000345575500004
000135162 037__ $$aFZJ-2013-03129
000135162 082__ $$a690
000135162 1001_ $$0P:(DE-Juel1)130830$$aMeier, Matthias$$b0$$eCorresponding author$$ufzj
000135162 245__ $$aUV nanoimprint for the replication of etched ZnO:Al textures applied in thin-film silicon solar cells
000135162 260__ $$aChichester$$bWiley$$c2014
000135162 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1417010999_32495
000135162 3367_ $$2DataCite$$aOutput Types/Journal article
000135162 3367_ $$00$$2EndNote$$aJournal Article
000135162 3367_ $$2BibTeX$$aARTICLE
000135162 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000135162 3367_ $$2DRIVER$$aarticle
000135162 520__ $$aIn this work, we present a technology for a high precision nanostructure replication process based on ultraviolet nanoimprint lithography for the application in the field of thin-film photovoltaics. The potential of the technology is demonstrated by the fabrication of microcrystalline silicon thin-film prototype solar cells. The high accuracy replication of random microstructures made from sputtered and etched ZnO:Al, used to scatter the incident light in thin solar cells, is shown by local topography investigations of the same 7.5 × 7.5 µm2 area on the master and the replica. Different types of imprint resists and imprint moulds were investigated to find the optimal, high precision replication technology. Two types of thin-film silicon solar cells, in p-i-n and n-i-p configuration, were fabricated to study the potential of the imprint technology for different applications. It is shown that solar cells deposited on an imprinted glass hold similar performances compared with reference solar cells fabricated with a standard process on textured ZnO:Al. Thus, it is demonstrated that the replication of light scattering structures by using an imprint process is an attractive method to decouple the scattering properties from the layer forming the electrical front contact. Because a simple and cheap high throughput process is used, this study additionally proves the relevance for the industrial mass production in the field of photovoltaics
000135162 536__ $$0G:(DE-HGF)POF2-111$$a111 - Thin Film Photovoltaics (POF2-111)$$cPOF2-111$$fPOF II$$x0
000135162 536__ $$0G:(DE-HGF)POF2-453$$a453 - Physics of the Cell (POF2-453)$$cPOF2-453$$fPOF II$$x1
000135162 536__ $$0G:(DE-HGF)POF2-423$$a423 - Sensorics and bioinspired systems (POF2-423)$$cPOF2-423$$fPOF II$$x2
000135162 536__ $$0G:(EU-Grant)283501$$aFAST TRACK - Accelerated development and prototyping of nano-technology-based high-efficiency thin-film silicon solar modules (283501)$$c283501$$fFP7-NMP-ENERGY-2011$$x3
000135162 588__ $$aDataset connected to CrossRef, juser.fz-juelich.de
000135162 7001_ $$0P:(DE-Juel1)130282$$aPaetzold, Ulrich W.$$b1$$ufzj
000135162 7001_ $$0P:(DE-Juel1)128719$$aPrömpers, Michael$$b2$$ufzj
000135162 7001_ $$0P:(DE-Juel1)130268$$aMerdzhanova, Tsvetelina$$b3$$ufzj
000135162 7001_ $$0P:(DE-Juel1)130225$$aCarius, Reinhard$$b4$$ufzj
000135162 7001_ $$0P:(DE-Juel1)130242$$aGordijn, Aad$$b5$$ufzj
000135162 773__ $$0PERI:(DE-600)2023295-0$$a10.1002/pip.2382$$gp. n/a - n/a$$n12$$p1226–1236$$tProgress in photovoltaics$$v22$$x1062-7995$$y2014
000135162 8564_ $$uhttps://juser.fz-juelich.de/record/135162/files/FZJ-2013-03129.pdf$$yRestricted
000135162 909CO $$ooai:juser.fz-juelich.de:135162$$pec_fundedresources$$pVDB$$popenaire
000135162 915__ $$0StatID:(DE-HGF)0010$$2StatID$$aJCR/ISI refereed
000135162 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR
000135162 915__ $$0StatID:(DE-HGF)0110$$2StatID$$aWoS$$bScience Citation Index
000135162 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded
000135162 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection
000135162 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List
000135162 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS
000135162 915__ $$0StatID:(DE-HGF)1050$$2StatID$$aDBCoverage$$bBIOSIS Previews
000135162 9141_ $$y2014
000135162 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130830$$aForschungszentrum Jülich GmbH$$b0$$kFZJ
000135162 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130282$$aForschungszentrum Jülich GmbH$$b1$$kFZJ
000135162 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128719$$aForschungszentrum Jülich GmbH$$b2$$kFZJ
000135162 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130268$$aForschungszentrum Jülich GmbH$$b3$$kFZJ
000135162 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130225$$aForschungszentrum Jülich GmbH$$b4$$kFZJ
000135162 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130242$$aForschungszentrum Jülich GmbH$$b5$$kFZJ
000135162 9132_ $$0G:(DE-HGF)POF3-121$$1G:(DE-HGF)POF3-120$$2G:(DE-HGF)POF3-100$$aDE-HGF$$bPOF III$$lForschungsbereich Energie$$vErneuerbare Energien$$x0
000135162 9131_ $$0G:(DE-HGF)POF2-111$$1G:(DE-HGF)POF2-110$$2G:(DE-HGF)POF2-100$$3G:(DE-HGF)POF2$$4G:(DE-HGF)POF$$aDE-HGF$$bEnergie$$lErneuerbare Energien$$vThin Film Photovoltaics$$x0
000135162 9131_ $$0G:(DE-HGF)POF2-453$$1G:(DE-HGF)POF2-450$$2G:(DE-HGF)POF2-400$$3G:(DE-HGF)POF2$$4G:(DE-HGF)POF$$aDE-HGF$$bSchlüsseltechnologien$$lBioSoft$$vPhysics of the Cell$$x1
000135162 9131_ $$0G:(DE-HGF)POF2-423$$1G:(DE-HGF)POF2-420$$2G:(DE-HGF)POF2-400$$3G:(DE-HGF)POF2$$4G:(DE-HGF)POF$$aDE-HGF$$bSchlüsseltechnologien$$lGrundlagen zukünftiger Informationstechnologien$$vSensorics and bioinspired systems$$x2
000135162 9201_ $$0I:(DE-Juel1)IEK-5-20101013$$kIEK-5$$lPhotovoltaik$$x0
000135162 9201_ $$0I:(DE-Juel1)ICS-8-20110106$$kICS-8$$lBioelektronik$$x1
000135162 9201_ $$0I:(DE-Juel1)PGI-8-20110106$$kPGI-8$$lBioelektronik$$x2
000135162 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJARA-FIT$$x3
000135162 980__ $$ajournal
000135162 980__ $$aVDB
000135162 980__ $$aI:(DE-Juel1)IEK-5-20101013
000135162 980__ $$aI:(DE-Juel1)ICS-8-20110106
000135162 980__ $$aI:(DE-Juel1)PGI-8-20110106
000135162 980__ $$aI:(DE-82)080009_20140620
000135162 980__ $$aUNRESTRICTED
000135162 981__ $$aI:(DE-Juel1)IMD-3-20101013
000135162 981__ $$aI:(DE-Juel1)IBI-3-20200312
000135162 981__ $$aI:(DE-Juel1)ICS-8-20110106
000135162 981__ $$aI:(DE-Juel1)PGI-8-20110106