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@INPROCEEDINGS{Uhlenbruck:135265,
      author       = {Uhlenbruck, Sven and Baumann, Stefan and Sebold, Doris and
                      Buchkremer, Hans Peter},
      title        = {{THIN}-{FILM} {MANUFACTURING} {OF} {INORGANIC} {OXYGEN}
                      {TRANSPORT} {MEMBRANES} {BY} {PHYSICAL} {VAPOR}
                      {DEPOSITION}},
      reportid     = {FZJ-2013-03219},
      year         = {2013},
      abstract     = {Keywords: oxygen transport membrane, physical vapor
                      deposition Gases with high oxygen content or even pure
                      oxygen can be used in certain future power plants for the
                      combustion process (e.g. so-called OXYFUEL process), or in
                      e.g. production processes in glass and cement industry.
                      Inorganic membrane systems are considered as an efficient
                      way to separate oxygen from air. It is evident that – as
                      long as materials with extremely high oxygen permeation are
                      not available – high oxygen fluxes through a membrane
                      require thin membranes. This paper discusses the
                      manufacturing of thin inorganic oxygen transport membranes
                      by physical vapor deposition (PVD). After a short review of
                      the technology in general, the focal point of the
                      presentation are ion-assisted techniques for the deposition
                      of ceria-, zirconia- and perovskite-based oxygen transport
                      membranes. Ion-assisted processes lead to layers with high
                      density but also to higher compressive stresses, which the
                      entire arrangement has to sustain. As a major finding from
                      the experiments, a balancing of layer density and mechanical
                      stress is necessary. Moreover, it is illustrated that the
                      surface morphology of the substrate crucially determines the
                      morphology of the PVD layers.},
      month         = {Sep},
      date          = {2013-09-04},
      organization  = {INORGANIC MEMBRANES FOR GREEN CHEMICAL
                       PRODUCTION AND CLEAN POWER GENERATION
                       SUMMER SCHOOL, Valencia (Spanien), 4
                       Sep 2013 - 6 Sep 2013},
      cin          = {IEK-1},
      cid          = {I:(DE-Juel1)IEK-1-20101013},
      pnm          = {123 - Fuel Cells (POF2-123) / SOFC - Solid Oxide Fuel Cell
                      (SOFC-20140602)},
      pid          = {G:(DE-HGF)POF2-123 / G:(DE-Juel1)SOFC-20140602},
      typ          = {PUB:(DE-HGF)1},
      url          = {https://juser.fz-juelich.de/record/135265},
}