Ch. Ohly, S. Hoffmann-Eifert, K. Szot and R. Waser

The potential of perovskite type thin films for applications in electronic devices or oxygen sensors strongly relies on a detailed understanding of electrical properties. While the electrical conductivity of bulk SrTiO3 is known in detail, the conductivity behavior of thin films (mainly as a function of oxygen partial pressure and temperature) is still unknown. The subject of this work, besides building a special measuring setup, is to examine the conduction characteristics of thin films. First results have shown an unexpected behavior accompanied by segregation effects, which lead to a certain restructuring of the film's morphology.