The potential of perovskite type thin films for applications in electronic devices strongly relies on their compatibility to silicon substrates. Whereas the electrical properties of electroceramic films are investigated in detail, the deposition parameters (particularly the deposition temperature) still is above the critical value of 450°C in many cases. The subject of this work is to examine the possibility of laser sintering of thin ceramic films with nanosecond laser pulses to induce changes in their structural and electronic properties in the heated region only. A model for the crystallization process and the thermally induced stresses is presented.