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Magnetron Cluster Sputter Source at the IEE
C. Breuer, N. Pontius, I. Wirth, P.S. Bechthold, M. Neeb, and W. Eberhardt
A magnetron cluster aggregation source has been constructed and successfully implemented into the existing cluster deposition apparatus at the IEE. The cluster source can be used to produce clusters of almost any conducting and semiconducting material. The reliability, stability and first mass spectra are exemplarily demonstrated for copper clusters. |
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Forschungszentrum Jülich, IFF, wwwiff@fz-juelich.de
Letzte Änderung: 01/03/2002, 12.20 URL: <http://www.fz-juelich.de /iff/report/2001-2002/Abstracts/ieeabst4.shtml> |