%0 Journal Article
%A Zimmermann, Thomas
%A Merdzhanova, Tsvetelina
%A Meier, Matthias
%A Gordijn, Aad
%T Dynamic deposition of microcrystalline silicon
%J SPIE newsroom
%V 0
%C Bellingham, Wash.
%M FZJ-2013-03348
%P 1-3
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1117/2.1201305.004856
%U https://juser.fz-juelich.de/record/136560