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@ARTICLE{Zimmermann:136560,
      author       = {Zimmermann, Thomas and Merdzhanova, Tsvetelina and Meier,
                      Matthias and Gordijn, Aad},
      title        = {{D}ynamic deposition of microcrystalline silicon},
      journal      = {SPIE newsroom},
      volume       = {0},
      address      = {Bellingham, Wash.},
      reportid     = {FZJ-2013-03348},
      pages        = {1-3},
      year         = {2013},
      cin          = {IEK-5},
      ddc          = {620},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {111 - Thin Film Photovoltaics (POF2-111) / FAST TRACK -
                      Accelerated development and prototyping of
                      nano-technology-based high-efficiency thin-film silicon
                      solar modules (283501)},
      pid          = {G:(DE-HGF)POF2-111 / G:(EU-Grant)283501},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.1117/2.1201305.004856},
      url          = {https://juser.fz-juelich.de/record/136560},
}