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001     136560
005     20240712084523.0
024 7 _ |a 10.1117/2.1201305.004856
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037 _ _ |a FZJ-2013-03348
082 _ _ |a 620
100 1 _ |a Zimmermann, Thomas
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245 _ _ |a Dynamic deposition of microcrystalline silicon
260 _ _ |a Bellingham, Wash.
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336 7 _ |a Journal Article
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700 1 _ |a Merdzhanova, Tsvetelina
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700 1 _ |a Meier, Matthias
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700 1 _ |a Gordijn, Aad
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