TY  - JOUR
AU  - Winden, Andreas
AU  - Mikulics, Martin
AU  - Haab, Anna
AU  - Grützmacher, Detlev
AU  - Hardtdegen, Hilde
TI  - Spectral Sensitivity Tuning of Vertical InN Nanopyramid-Based Photodetectors
JO  - Japanese journal of applied physics
VL  - 52
IS  - 8S
SN  - 1347-4065
CY  - Tokyo
PB  - Inst. of Pure and Applied Physics
M1  - FZJ-2013-04798
SP  - 08JF05 
PY  - 2013
AB  - In this paper, we report on the fabrication of InN nanopyramid-based photodetectors operating within the telecommunication wavelength range. We found that the spectral sensitivity of individually addressable InN nanopyramids can be tuned within an interval of 1550–1750 nm since the band edge luminescence energy correlates with the structure size. According to this, we optimized the nanopatterning technique of SiO2/GaN/sapphire substrates as well as the selective area growth to precisely control the nanostructure dimensions. Furthermore, we developed a technological process to contact InN nanopyramids and to integrate them into a high-frequency device layout. Thus, InN nanopyramid-based photodetectors exhibit a low RC constant, low dark currents below 1 nA, as well as a high responsivity of about 0.2 A/W at a wavelength of 1.55 µm.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000323883100087
DO  - DOI:10.7567/JJAP.52.08JF05
UR  - https://juser.fz-juelich.de/record/138711
ER  -