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@ARTICLE{Winden:138711,
      author       = {Winden, Andreas and Mikulics, Martin and Haab, Anna and
                      Grützmacher, Detlev and Hardtdegen, Hilde},
      title        = {{S}pectral {S}ensitivity {T}uning of {V}ertical {I}n{N}
                      {N}anopyramid-{B}ased {P}hotodetectors},
      journal      = {Japanese journal of applied physics},
      volume       = {52},
      number       = {8S},
      issn         = {1347-4065},
      address      = {Tokyo},
      publisher    = {Inst. of Pure and Applied Physics},
      reportid     = {FZJ-2013-04798},
      pages        = {08JF05},
      year         = {2013},
      abstract     = {In this paper, we report on the fabrication of InN
                      nanopyramid-based photodetectors operating within the
                      telecommunication wavelength range. We found that the
                      spectral sensitivity of individually addressable InN
                      nanopyramids can be tuned within an interval of 1550–1750
                      nm since the band edge luminescence energy correlates with
                      the structure size. According to this, we optimized the
                      nanopatterning technique of SiO2/GaN/sapphire substrates as
                      well as the selective area growth to precisely control the
                      nanostructure dimensions. Furthermore, we developed a
                      technological process to contact InN nanopyramids and to
                      integrate them into a high-frequency device layout. Thus,
                      InN nanopyramid-based photodetectors exhibit a low RC
                      constant, low dark currents below 1 nA, as well as a high
                      responsivity of about 0.2 A/W at a wavelength of 1.55 µm.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)VDB881},
      pnm          = {423 - Sensorics and bioinspired systems (POF2-423)},
      pid          = {G:(DE-HGF)POF2-423},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000323883100087},
      doi          = {10.7567/JJAP.52.08JF05},
      url          = {https://juser.fz-juelich.de/record/138711},
}