TY  - JOUR
AU  - Gunes, Mehmet
AU  - Johanson, R E
AU  - Kasap, S O
AU  - Finger, F
AU  - Lambertz, A
TI  - Conductance fuctuations in VHF-PECVD grown hydrogenated microcrystalline silicon thin films
JO  - Journal of materials science / Materials in electronics
VL  - 14
SN  - 0957-4522
CY  - Dordrecht [u.a.]
PB  - Springer Science + Business Media B.V
M1  - FZJ-2013-05391
SP  - 731 - 732
PY  - 2003
AB  - Coplanar conductance fluctuations or excess noise of undoped hydrogenated microcrystalline silicon (c-Si : H) thin films grown by VHF-PECVD from silane–hydrogen mixtures with silane concentrations from 2% to 6% have been studied between room temperature and 470 K. We report that undoped c-Si : H thin films show similar noise-power spectra to those of undoped a-Si : H films in a coplanar sample geometry. At lower temperatures, the noise with the slope =0.600.07 and at higher temperatures, the noise with the slope close to unity dominate the spectrum. The noise magnitude decreases with decreasing silane concentration and becomes strongly temperature dependent with increased crystallinity.
LB  - PUB:(DE-HGF)16
UR  - https://juser.fz-juelich.de/record/139395
ER  -