%0 Conference Paper
%A Hapke, P
%A Carius, R
%A Finger, F
%A Lambertz, A
%A Vetterl, O
%A Wagner, H
%T Preparation of microcrystalline silicon with the layer-by-layer technique at various plasma excitation frequencies
%J MRS online proceedings library
%@ 1946-4274
%C Warrendale, Pa.
%I MRS
%M FZJ-2013-05395
%P 737 - 742
%D 1996
%B MRS
%C 16 Apr 2013 - 5 Nov 2013, San Fran (USA)
Y2 16 Apr 2013 - 5 Nov 2013
M2 San Fran, USA
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)16
%9 Contribution to a conference proceedingsJournal Article
%U https://juser.fz-juelich.de/record/139399