TY  - CONF
AU  - Hapke, P
AU  - Carius, R
AU  - Finger, F
AU  - Lambertz, A
AU  - Vetterl, O
AU  - Wagner, H
TI  - Preparation of microcrystalline silicon with the layer-by-layer technique at various plasma excitation frequencies
JO  - MRS online proceedings library
SN  - 1946-4274
CY  - Warrendale, Pa.
PB  - MRS
M1  - FZJ-2013-05395
SP  - 737 - 742
PY  - 1996
T2  - MRS
CY  - 16 Apr 2013 - 5 Nov 2013, San Fran (USA)
Y2  - 16 Apr 2013 - 5 Nov 2013
M2  - San Fran, USA
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)16
UR  - https://juser.fz-juelich.de/record/139399
ER  -