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| Hauptseite > Publikationsdatenbank > Preparation of microcrystalline silicon with the layer-by-layer technique at various plasma excitation frequencies > print |
| Hauptseite > Publikationsdatenbank > Preparation of microcrystalline silicon with the layer-by-layer technique at various plasma excitation frequencies > print |
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| 111 | 2 | _ | |a MRS |c San Fran |d 2013-04-16 - 2013-11-05 |w USA |
| 245 | _ | _ | |a Preparation of microcrystalline silicon with the layer-by-layer technique at various plasma excitation frequencies |
| 260 | _ | _ | |a Warrendale, Pa. |c 1996 |b MRS |
| 300 | _ | _ | |a 737 - 742 |
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