%0 Journal Article
%A Pohl, Christoph
%A Raab, Nicolas
%A Mitterer, Martin
%A Tarakina, Nadezda
%A Breuer, Uwe
%A Brunner, Karl
%T Multilayer structures of silicon-suboxide embedded in single crystal silicon
%J Journal of crystal growth
%V 389
%@ 0022-0248
%C Amsterdam [u.a.]
%I Elsevier
%M FZJ-2013-06402
%P 12 - 17
%D 2014
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000335768600003
%R 10.1016/j.jcrysgro.2013.11.073
%U https://juser.fz-juelich.de/record/141204