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@ARTICLE{Oehme:141288,
author = {Oehme, M. and Buca, D. and Kostecki, K. and Wirths, S. and
Holländer, B. and Kasper, E. and Schulze, J.},
title = {{E}pitaxial growth of highly compressively strained
{G}e{S}n alloys up to $12.5\%$ {S}n},
journal = {Journal of crystal growth},
volume = {384},
issn = {1873-5002},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {FZJ-2013-06482},
pages = {71 - 76},
year = {2013},
abstract = {This paper reports on the growth and characterization of
highly compressive strained GeSn layers on thin strain
relaxed Ge virtual substrates on Si wafers. Sn concentration
up to $12.5\%,$ which is about more than 10 times the
thermal equilibrium predicted for GeSn binaries, are
successfully epitaxially grown by ultra-low temperature (160
°C) molecular beam epitaxy. A minimum channeling yield of
$9\%$ evidence the high crystalline quality of the GeSn
alloys while angular channeling scan demonstrate that all
GeSn layers are fully pseudomorphic on the relaxed Ge
virtual substrate. The strain analysis shows a deviation
from the Vegard's law for Sn contents above $8\%.$ The
analysis is completed by the Raman mode dependence on the
alloys composition.},
cin = {PGI-9 / JARA-FIT},
ddc = {540},
cid = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
pnm = {421 - Frontiers of charge based Electronics (POF2-421)},
pid = {G:(DE-HGF)POF2-421},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000326680900014},
doi = {10.1016/j.jcrysgro.2013.09.018},
url = {https://juser.fz-juelich.de/record/141288},
}