%0 Conference Paper
%A Stefanov, S.
%A Serra, C.
%A Benedetti, A.
%A Conde, J. C.
%A Werner, J.
%A Oehme, M.
%A Schulze, J.
%A Wirths, S.
%A Buca, D.
%A Chiussi, S.
%T Silicon-Germanium-Tin Microstructures obtained through Mask Projection assisted PLIE
%M FZJ-2013-06507
%D 2013
%B 6th International Symposium on Control of Semiconductor Interfaces
%C 2 Jun 2013 - 6 Jun 2013, Fukuoka (Japan)
Y2 2 Jun 2013 - 6 Jun 2013
M2 Fukuoka, Japan
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/141313