TY  - CONF
AU  - Stefanov, S.
AU  - Serra, C.
AU  - Benedetti, A.
AU  - Conde, J. C.
AU  - Werner, J.
AU  - Oehme, M.
AU  - Schulze, J.
AU  - Wirths, S.
AU  - Buca, D.
AU  - Chiussi, S.
TI  - Silicon-Germanium-Tin Microstructures obtained through Mask Projection assisted PLIE
M1  - FZJ-2013-06507
PY  - 2013
T2  - 6th International Symposium on Control of Semiconductor Interfaces
CY  - 2 Jun 2013 - 6 Jun 2013, Fukuoka (Japan)
Y2  - 2 Jun 2013 - 6 Jun 2013
M2  - Fukuoka, Japan
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/141313
ER  -