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@ARTICLE{Mackova:150540,
author = {Mackova, A. and Malinský, P. and Sofer, Z. and Šimek, P.
and Sedmidubský, D. and Mikulics, Martin and Wilhelm, R.
A.},
title = {{A} study of the structural properties of {G}a{N} implanted
by various rare-earth ions},
journal = {Nuclear instruments $\&$ methods in physics research / B},
volume = {307},
issn = {0168-583X},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {FZJ-2014-00594},
pages = {446 - 451},
year = {2013},
abstract = {GaN layers with h0001i crystallographic orientation, grown
by low-pressure metal-organic vapourphase epitaxy (MOVPE) on
c-plane sapphire substrates, were implanted with 200 and 400
keV Sm+, Tm+, Eu+, Tb+ and Ho+ ions at fluencies of 1
1015–1 1016 cm2. The composition of the ion-implanted
layers and concentration profiles of the implanted atoms
were studied by Rutherford Back-Scattering spectrometry
(RBS). The profiles were compared to SRIM 2008 simulations.
The structural properties of the ion-implanted layers were
characterised by RBS-channelling and Raman spectroscopy.
Changes in the surface morphology caused by the ion
implantation were examined by Atomic Force Microscopy (AFM).
A structural analysis showed a high disorder of the atoms
close to the amorphised structure at the surface layer above
an implantation fluence of 5 1015 cm2 while lower disorder
density was observed in the bulk according to the projected
range of 400 keV ions. The post-implantation annealing
induced significant changes only in the Sm and Eu depth
profiles; a diffusion of rare-earths implanted at a fluence
of 5 1015 cm2 to the surface was observed. The annealing
caused the reconstruction of the surface layer accompanied
by surface-roughness enhancement.},
cin = {PGI-9},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {422 - Spin-based and quantum information (POF2-422)},
pid = {G:(DE-HGF)POF2-422},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000321722200099},
doi = {10.1016/j.nimb.2012.11.079},
url = {https://juser.fz-juelich.de/record/150540},
}