%0 Journal Article
%A Weber, Dieter
%A Vőfély, Róza
%A Chen, Yuehua
%A Mourzina, Youlia
%A Poppe, U.
%T Variable resistor made by repeated steps of epitaxial deposition and lithographic structuring of oxide layers by using wet chemical etchants
%J Thin solid films
%V 533
%@ 0040-6090
%C Amsterdam [u.a.]
%I Elsevier
%M FZJ-2014-01007
%P 43 - 47
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000317266000011
%R 10.1016/j.tsf.2012.11.118
%U https://juser.fz-juelich.de/record/150976