TY - JOUR
AU - Weber, Dieter
AU - Vőfély, Róza
AU - Chen, Yuehua
AU - Mourzina, Youlia
AU - Poppe, U.
TI - Variable resistor made by repeated steps of epitaxial deposition and lithographic structuring of oxide layers by using wet chemical etchants
JO - Thin solid films
VL - 533
SN - 0040-6090
CY - Amsterdam [u.a.]
PB - Elsevier
M1 - FZJ-2014-01007
SP - 43 - 47
PY - 2013
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000317266000011
DO - DOI:10.1016/j.tsf.2012.11.118
UR - https://juser.fz-juelich.de/record/150976
ER -