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@ARTICLE{Weber:150976,
      author       = {Weber, Dieter and Vőfély, Róza and Chen, Yuehua and
                      Mourzina, Youlia and Poppe, U.},
      title        = {{V}ariable resistor made by repeated steps of epitaxial
                      deposition and lithographic structuring of oxide layers by
                      using wet chemical etchants},
      journal      = {Thin solid films},
      volume       = {533},
      issn         = {0040-6090},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {FZJ-2014-01007},
      pages        = {43 - 47},
      year         = {2013},
      cin          = {PGI-8 / PGI-5 / ICS-8 / JARA-FIT},
      ddc          = {070},
      cid          = {I:(DE-Juel1)PGI-8-20110106 / I:(DE-Juel1)PGI-5-20110106 /
                      I:(DE-Juel1)ICS-8-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {423 - Sensorics and bioinspired systems (POF2-423) / 453 -
                      Physics of the Cell (POF2-453)},
      pid          = {G:(DE-HGF)POF2-423 / G:(DE-HGF)POF2-453},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000317266000011},
      doi          = {10.1016/j.tsf.2012.11.118},
      url          = {https://juser.fz-juelich.de/record/150976},
}