TY - JOUR AU - Tashman, J. W. AU - Lee, J. H. AU - Paik, H. AU - Moyer, J. A. AU - Misra, R. AU - Mundy, J. A. AU - Spila, T. AU - Merz, T. A. AU - Schubert, J. AU - Muller, D. A. AU - Schiffer, P. AU - Schlom, D. G. TI - Epitaxial growth of VO2 by periodic annealing JO - Applied physics letters VL - 104 IS - 6 SN - 1077-3118 CY - Melville, NY PB - American Institute of Physics M1 - FZJ-2014-01286 SP - 063104 - PY - 2014 N1 - VC 2014 AIP Publishing LLC AB - We report the growth of ultrathin VO2 films on rutile TiO2 (001) substrates via reactivemolecular-beam epitaxy. The films were formed by the cyclical deposition of amorphous vanadiumand its subsequent oxidation and transformation to VO2 via solid-phase epitaxy. Significantmetal-insulator transitions were observed in films as thin as 2.3 nm, where a resistance changeDR/R of 25 was measured. Low angle annular dark field scanning transmission electronmicroscopy was used in conjunction with electron energy loss spectroscopy to study thefilm/substrate interface and revealed the vanadium to be tetravalent and the titanium interdiffusionto be limited to 1.6 nm. LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000331803800070 DO - DOI:10.1063/1.4864404 UR - https://juser.fz-juelich.de/record/151307 ER -