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@ARTICLE{Grootoonk:151846,
      author       = {Grootoonk, B. and Woerdenweber, J. and Gordijn, A. and
                      Gabriel, O. and Meier, Matthias},
      title        = {{M}onitoring of powder formation via optical emission
                      spectroscopy and self-bias-voltage measurements for high
                      depletion µc-{S}i:{H} deposition regimes},
      journal      = {Canadian journal of physics},
      volume       = {92},
      number       = {7/8},
      issn         = {1208-6045},
      address      = {Ottawa, Ontario},
      publisher    = {NCR Research Press},
      reportid     = {FZJ-2014-01704},
      pages        = {736 - 739},
      year         = {2014},
      abstract     = {Microcrystalline silicon fabricated by plasma-enhanced
                      chemical vapour deposition (PECVD) is commonly used as an
                      absorber material in thin-film tandem solar cells. The
                      source gases used in the μc-Si:H PECVD process are silane
                      and hydrogen. One way to further increase the production
                      efficiency of solar modules is to increase the gas
                      utilization during deposition of the silicon absorber layer.
                      In this work this is achieved by reducing the hydrogen flow.
                      These deposition conditions are known to promote powder
                      formation in the plasma, which can be detrimental for the
                      solar cell’s conversion efficiency as well as for the
                      maintenance of the system. Therefore, an easily applicable
                      approach to determine powder formation in-situ during the
                      PECVD process is presented. Both the self-bias-voltage and
                      the ratio of the optical emissions from SiH* to Hβ as
                      function of the gas residence time in the plasma is used to
                      determine the onset of powder formation. Furthermore, a
                      clear link between the precursor gas residence time in the
                      plasma to the onset of powder formation is shown independent
                      of the chosen pressure.},
      cin          = {IEK-5},
      ddc          = {530},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {111 - Thin Film Photovoltaics (POF2-111) / HITEC -
                      Helmholtz Interdisciplinary Doctoral Training in Energy and
                      Climate Research (HITEC) (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF2-111 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000339379500041},
      doi          = {10.1139/cjp-2013-0604},
      url          = {https://juser.fz-juelich.de/record/151846},
}