000153304 001__ 153304 000153304 005__ 20240610121054.0 000153304 0247_ $$2doi$$a10.1088/0268-1242/29/7/075005 000153304 0247_ $$2ISSN$$a0268-1242 000153304 0247_ $$2ISSN$$a1361-6641 000153304 0247_ $$2WOS$$aWOS:000337356600006 000153304 037__ $$aFZJ-2014-02947 000153304 082__ $$a530 000153304 1001_ $$0P:(DE-Juel1)144017$$aSchäfer, A.$$b0$$eCorresponding Author$$ufzj 000153304 245__ $$aHexagonal GdScO 3 : an epitaxial high-κ dielectric for GaN 000153304 260__ $$aBristol$$bIOP Publ.$$c2014 000153304 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1399297543_3033 000153304 3367_ $$2DataCite$$aOutput Types/Journal article 000153304 3367_ $$00$$2EndNote$$aJournal Article 000153304 3367_ $$2BibTeX$$aARTICLE 000153304 3367_ $$2ORCID$$aJOURNAL_ARTICLE 000153304 3367_ $$2DRIVER$$aarticle 000153304 520__ $$aGdScO3 was deposited by pulsed laser deposition on two different templates suitable for III-Ngrowth: metalorganic vapour phase epitaxial GaN (0 0 0 1) on sapphire and molecular beamepitaxial Y2O3 on Si (1 1 1). The structure and crystallinity of the layers were determined aswell as the band gap and permittivity of the material. It was found that GdScO3 growsepitaxially and crystallizes hexagonally in contrast to the usually found orthorhombic oramorphous phases. A band gap and permittivity κ of 5.2 eV and 24 were found, respectively,making GdScO3 a promising epitaxial gate dielectric for III-N transistor applications. 000153304 536__ $$0G:(DE-HGF)POF2-421$$a421 - Frontiers of charge based Electronics (POF2-421)$$cPOF2-421$$fPOF II$$x0 000153304 588__ $$aDataset connected to CrossRef, juser.fz-juelich.de 000153304 7001_ $$0P:(DE-Juel1)133839$$aBesmehn, A.$$b1$$ufzj 000153304 7001_ $$0P:(DE-Juel1)130811$$aLuysberg, M.$$b2$$ufzj 000153304 7001_ $$0P:(DE-Juel1)144014$$aWinden, A.$$b3$$ufzj 000153304 7001_ $$0P:(DE-Juel1)128637$$aStoica, T.$$b4$$ufzj 000153304 7001_ $$0P:(DE-Juel1)139578$$aSchnee, M.$$b5$$ufzj 000153304 7001_ $$0P:(DE-Juel1)128648$$aZander, W.$$b6$$ufzj 000153304 7001_ $$0P:(DE-HGF)0$$aNiu, G.$$b7 000153304 7001_ $$0P:(DE-HGF)0$$aSchroeder, T.$$b8 000153304 7001_ $$0P:(DE-Juel1)128609$$aMantl, S.$$b9$$ufzj 000153304 7001_ $$0P:(DE-Juel1)125593$$aHardtdegen, H.$$b10$$ufzj 000153304 7001_ $$0P:(DE-Juel1)128613$$aMikulics, M.$$b11$$ufzj 000153304 7001_ $$0P:(DE-Juel1)128631$$aSchubert, J.$$b12$$ufzj 000153304 773__ $$0PERI:(DE-600)1361285-2$$a10.1088/0268-1242/29/7/075005$$gVol. 29, no. 7, p. 075005 -$$n7$$p075005 $$tSemiconductor science and technology$$v29$$x1361-6641$$y2014 000153304 8564_ $$uhttps://juser.fz-juelich.de/record/153304/files/FZJ-2014-02947.pdf$$yRestricted 000153304 909CO $$ooai:juser.fz-juelich.de:153304$$pVDB 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)144017$$aForschungszentrum Jülich GmbH$$b0$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)133839$$aForschungszentrum Jülich GmbH$$b1$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130811$$aForschungszentrum Jülich GmbH$$b2$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)144014$$aForschungszentrum Jülich GmbH$$b3$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128637$$aForschungszentrum Jülich GmbH$$b4$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)139578$$aForschungszentrum Jülich GmbH$$b5$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128648$$aForschungszentrum Jülich GmbH$$b6$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128609$$aForschungszentrum Jülich GmbH$$b9$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125593$$aForschungszentrum Jülich GmbH$$b10$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128613$$aForschungszentrum Jülich GmbH$$b11$$kFZJ 000153304 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128631$$aForschungszentrum Jülich GmbH$$b12$$kFZJ 000153304 9132_ $$0G:(DE-HGF)POF3-521$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Electron Charge-Based Phenomena$$x0 000153304 9131_ $$0G:(DE-HGF)POF2-421$$1G:(DE-HGF)POF2-420$$2G:(DE-HGF)POF2-400$$3G:(DE-HGF)POF2$$4G:(DE-HGF)POF$$aDE-HGF$$bSchlüsseltechnologien$$lGrundlagen zukünftiger Informationstechnologien$$vFrontiers of charge based Electronics$$x0 000153304 9141_ $$y2014 000153304 915__ $$0StatID:(DE-HGF)0010$$2StatID$$aJCR/ISI refereed 000153304 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR 000153304 915__ $$0StatID:(DE-HGF)0110$$2StatID$$aWoS$$bScience Citation Index 000153304 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded 000153304 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection 000153304 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List 000153304 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS 000153304 915__ $$0StatID:(DE-HGF)0420$$2StatID$$aNationallizenz 000153304 915__ $$0StatID:(DE-HGF)1020$$2StatID$$aDBCoverage$$bCurrent Contents - Social and Behavioral Sciences 000153304 920__ $$lyes 000153304 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0 000153304 9201_ $$0I:(DE-Juel1)ZEA-3-20090406$$kZEA-3$$lAnalytik$$x1 000153304 9201_ $$0I:(DE-Juel1)PGI-5-20110106$$kPGI-5$$lMikrostrukturforschung$$x2 000153304 9201_ $$0I:(DE-Juel1)PGI-6-20110106$$kPGI-6$$lElektronische Eigenschaften$$x3 000153304 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJARA-FIT$$x4 000153304 980__ $$ajournal 000153304 980__ $$aVDB 000153304 980__ $$aI:(DE-Juel1)PGI-9-20110106 000153304 980__ $$aI:(DE-Juel1)ZEA-3-20090406 000153304 980__ $$aI:(DE-Juel1)PGI-5-20110106 000153304 980__ $$aI:(DE-Juel1)PGI-6-20110106 000153304 980__ $$aI:(DE-82)080009_20140620 000153304 980__ $$aUNRESTRICTED 000153304 981__ $$aI:(DE-Juel1)ER-C-1-20170209 000153304 981__ $$aI:(DE-Juel1)ZEA-3-20090406 000153304 981__ $$aI:(DE-Juel1)PGI-5-20110106 000153304 981__ $$aI:(DE-Juel1)PGI-6-20110106