TY  - CONF
AU  - Durini, Daniel
AU  - Weyers, Sascha
AU  - Goehlich, Andreas
AU  - Brockherde, Werner
AU  - Paschen, Uwe
AU  - Vogt, Holger
AU  - Federica, Villa
AU  - Bronzi, Danilo
AU  - Tisa, Simone
AU  - Tosi, Alberto
AU  - Zappa, Franco
TI  - CMOS Technology for SPAD / SiPM: Results from the MiSPiA Project
M1  - FZJ-2014-03352
PY  - 2014
AB  - Many demanding applications require single-photon detectors with very large active area, very low noise, high detection efficiency, and precise time response. Single-photon avalanche diodes (SPADs) provide all the advantages of solid-state devices, but in many applications other single-photon detectors, like photomultiplier tubes, have been preferred so far due to their larger active area. We developed silicon SPADs with active area diameters as large as 500 µm in a fully standard CMOS process. The 500 µm SPAD exhibits 55% peak photon detection efficiency at 420 nm, 8 kcps of dark counting rate at 0°C, and high uniformity of the sensitivity in the active area. These devices can be used with on-chip integrated quenching circuitry, which reduces the afterpulsing probability, or with external ciruits to achieve even better photon-timing performances, as good as 92 ps FWHM for a 100 µm diameter SPAD. Owing to the state-of-the-art performance, not only compared to the CMOS SPADs but also SPADs developed in custom technologies, very high uniformity and low cros-talk probability, these CMOS SPADs can be succesfully employed in detector arrays and single-chip imagers for single-photon counting and timing applications. In order to solve the CMOS SPAD fill-factor problems, back-side illuminated SPAD (BackSPAD) technology was developed based on a 0.35 µm SOI-CMOS process, where the wafer containing readout circuitry fabricated in a standard CMOS technology is flip-bonded on top of the detector array SOI-wafer, the handle-wafer of which is then completely removed to enable back-side illumination.
T2  - 7th Fraunhofer IMS Workshop "CMOS Imaging: From Photon to Camera", Duisburg, Germany, May 20-21, 2014
CY  - 20 May 2014 - 21 May 2014, Duisburg (Germany)
Y2  - 20 May 2014 - 21 May 2014
M2  - Duisburg, Germany
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/153873
ER  -