%0 Conference Paper
%A Mauer, Georg
%A Vassen, Robert
%T Application of Optical Emission Spectroscopy for Diagnostics of SPS and PS-PVD
%M FZJ-2014-03418
%D 2014
%B 28th International Conference on Surface Modification Technologies, Tampere University of Technology
%C 16 Jun 2014 - 18 Jun 2014, Tampere (Finnland)
Y2 16 Jun 2014 - 18 Jun 2014
M2 Tampere, Finnland
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/153985