000153985 001__ 153985
000153985 005__ 20240708132756.0
000153985 037__ $$aFZJ-2014-03418
000153985 1001_ $$0P:(DE-Juel1)129633$$aMauer, Georg$$b0$$eCorresponding Author$$ufzj
000153985 1112_ $$a28th International Conference on Surface Modification Technologies, Tampere University of Technology$$cTampere$$d2014-06-16 - 2014-06-18$$gSMT 28$$wFinnland
000153985 245__ $$aApplication of Optical Emission Spectroscopy for Diagnostics of SPS and PS-PVD
000153985 260__ $$c2014
000153985 3367_ $$0PUB:(DE-HGF)6$$2PUB:(DE-HGF)$$aConference Presentation$$bconf$$mconf$$s1404396991_9409$$xOther
000153985 3367_ $$033$$2EndNote$$aConference Paper
000153985 3367_ $$2DataCite$$aOther
000153985 3367_ $$2ORCID$$aLECTURE_SPEECH
000153985 3367_ $$2DRIVER$$aconferenceObject
000153985 3367_ $$2BibTeX$$aINPROCEEDINGS
000153985 536__ $$0G:(DE-HGF)POF2-122$$a122 - Power Plants (POF2-122)$$cPOF2-122$$fPOF II$$x0
000153985 7001_ $$0P:(DE-Juel1)129670$$aVassen, Robert$$b1$$ufzj
000153985 773__ $$y2014
000153985 909CO $$ooai:juser.fz-juelich.de:153985$$pVDB
000153985 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)129633$$aForschungszentrum Jülich GmbH$$b0$$kFZJ
000153985 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)129670$$aForschungszentrum Jülich GmbH$$b1$$kFZJ
000153985 9132_ $$0G:(DE-HGF)POF3-113$$1G:(DE-HGF)POF3-110$$2G:(DE-HGF)POF3-100$$aDE-HGF$$bForschungsbereich Energie$$lEnergieeffizienz, Materialien und Ressourcen$$vMethods and Concepts for Material Development$$x0
000153985 9131_ $$0G:(DE-HGF)POF2-122$$1G:(DE-HGF)POF2-120$$2G:(DE-HGF)POF2-100$$3G:(DE-HGF)POF2$$4G:(DE-HGF)POF$$aDE-HGF$$bEnergie$$lRationelle Energieumwandlung und -nutzung$$vPower Plants$$x0
000153985 9141_ $$y2014
000153985 9201_ $$0I:(DE-Juel1)IEK-1-20101013$$kIEK-1$$lWerkstoffsynthese und Herstellungsverfahren$$x0
000153985 980__ $$aconf
000153985 980__ $$aVDB
000153985 980__ $$aI:(DE-Juel1)IEK-1-20101013
000153985 980__ $$aUNRESTRICTED
000153985 981__ $$aI:(DE-Juel1)IMD-2-20101013