TY  - CONF
AU  - Mauer, Georg
AU  - Vassen, Robert
TI  - Application of Optical Emission Spectroscopy for Diagnostics of SPS and PS-PVD
M1  - FZJ-2014-03418
PY  - 2014
T2  - 28th International Conference on Surface Modification Technologies, Tampere University of Technology
CY  - 16 Jun 2014 - 18 Jun 2014, Tampere (Finnland)
Y2  - 16 Jun 2014 - 18 Jun 2014
M2  - Tampere, Finnland
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/153985
ER  -