000154092 001__ 154092
000154092 005__ 20210129213832.0
000154092 0247_ $$2doi$$a10.1002/pssa.201330034
000154092 0247_ $$2ISSN$$a1862-6319
000154092 0247_ $$2ISSN$$a0031-8965
000154092 0247_ $$2ISSN$$a1862-6300
000154092 0247_ $$2ISSN$$a1521-396X
000154092 0247_ $$2WOS$$aWOS:000332000500008
000154092 0247_ $$2altmetric$$aaltmetric:1919247
000154092 037__ $$aFZJ-2014-03494
000154092 082__ $$a530
000154092 1001_ $$0P:(DE-Juel1)142040$$aKärkkänen, Irina$$b0$$eCorresponding Author$$ufzj
000154092 245__ $$aStudy of atomic layer deposited ZrO 2 and ZrO 2 /TiO 2 films for resistive switching application
000154092 260__ $$aWeinheim$$bWiley-VCH$$c2014
000154092 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1403102343_30224
000154092 3367_ $$2DataCite$$aOutput Types/Journal article
000154092 3367_ $$00$$2EndNote$$aJournal Article
000154092 3367_ $$2BibTeX$$aARTICLE
000154092 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000154092 3367_ $$2DRIVER$$aarticle
000154092 520__ $$aThin ZrO2 films and ZrO2/TiO2 bilayers grown by atomic layer deposition (ALD) are integrated into metal–oxide–metal (MOM) structures for investigation of resistive switching (RS) properties. The films have different microstructure depending on the used ALD oxygen source and stacking sequence for the bilayers. Pt/ZrO2/Ti/Pt devices show unipolar RS for oxide thicknesses of 11–18 nm. The devices with O3 grown ZrO2 show higher yield in comparison to the ones with H2O processed oxide. The switching polarity of the Pt/ZrO2/Ti/Pt cells depends on the thickness of the Ti electrode layer. The increase of the Ti layer thickness leads to a change in switching polarity from unipolar to bipolar. The formation of ZrO2/TiO2 bilayers results in changes in the RS behavior of the MOM cells depending on the stacking sequence.
000154092 536__ $$0G:(DE-HGF)POF2-424$$a424 - Exploratory materials and phenomena (POF2-424)$$cPOF2-424$$fPOF II$$x0
000154092 588__ $$aDataset connected to CrossRef, juser.fz-juelich.de
000154092 7001_ $$0P:(DE-Juel1)145072$$aShkabko, Andrey$$b1$$ufzj
000154092 7001_ $$0P:(DE-HGF)0$$aHeikkilä, Mikko$$b2
000154092 7001_ $$0P:(DE-HGF)0$$aNiinistö, Jaakko$$b3
000154092 7001_ $$0P:(DE-HGF)0$$aRitala, Mikko$$b4
000154092 7001_ $$0P:(DE-HGF)0$$aLeskelä, Markku$$b5
000154092 7001_ $$0P:(DE-Juel1)130717$$aHoffmann-Eifert, Susanne$$b6$$ufzj
000154092 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b7
000154092 773__ $$0PERI:(DE-600)1481091-8$$a10.1002/pssa.201330034$$gVol. 211, no. 2, p. 301 - 309$$n2$$p301 - 309$$tPhysica status solidi / A$$v211$$x1862-6300$$y2014
000154092 8564_ $$uhttps://juser.fz-juelich.de/record/154092/files/FZJ-2014-03494.pdf$$yRestricted$$zPublished final document.
000154092 909CO $$ooai:juser.fz-juelich.de:154092$$pVDB
000154092 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)131022$$aForschungszentrum Jülich GmbH$$b7$$kFZJ
000154092 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)145072$$aForschungszentrum Jülich GmbH$$b1$$kFZJ
000154092 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130717$$aForschungszentrum Jülich GmbH$$b6$$kFZJ
000154092 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)131022$$aForschungszentrum Jülich GmbH$$b7$$kFZJ
000154092 9132_ $$0G:(DE-HGF)POF3-524$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Collective States$$x0
000154092 9131_ $$0G:(DE-HGF)POF2-424$$1G:(DE-HGF)POF2-420$$2G:(DE-HGF)POF2-400$$3G:(DE-HGF)POF2$$4G:(DE-HGF)POF$$aDE-HGF$$bSchlüsseltechnologien$$lGrundlagen zukünftiger Informationstechnologien$$vExploratory materials and phenomena$$x0
000154092 9141_ $$y2014
000154092 915__ $$0StatID:(DE-HGF)0010$$2StatID$$aJCR/ISI refereed
000154092 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR
000154092 915__ $$0StatID:(DE-HGF)0110$$2StatID$$aWoS$$bScience Citation Index
000154092 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded
000154092 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection
000154092 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List
000154092 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS
000154092 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline
000154092 915__ $$0StatID:(DE-HGF)0420$$2StatID$$aNationallizenz
000154092 915__ $$0StatID:(DE-HGF)1040$$2StatID$$aDBCoverage$$bZoological Record
000154092 9201_ $$0I:(DE-Juel1)PGI-7-20110106$$kPGI-7$$lElektronische Materialien$$x0
000154092 980__ $$ajournal
000154092 980__ $$aVDB
000154092 980__ $$aI:(DE-Juel1)PGI-7-20110106
000154092 980__ $$aUNRESTRICTED