guest ::
| Home > Publications database > Study of atomic layer deposited ZrO 2 and ZrO 2 /TiO 2 films for resistive switching application > print |
| Home > Publications database > Study of atomic layer deposited ZrO 2 and ZrO 2 /TiO 2 films for resistive switching application > print |
| 001 | 154092 | ||
| 005 | 20210129213832.0 | ||
| 024 | 7 | _ | |a 10.1002/pssa.201330034 |2 doi |
| 024 | 7 | _ | |a 1862-6319 |2 ISSN |
| 024 | 7 | _ | |a 0031-8965 |2 ISSN |
| 024 | 7 | _ | |a 1862-6300 |2 ISSN |
| 024 | 7 | _ | |a 1521-396X |2 ISSN |
| 024 | 7 | _ | |a WOS:000332000500008 |2 WOS |
| 024 | 7 | _ | |a altmetric:1919247 |2 altmetric |
| 037 | _ | _ | |a FZJ-2014-03494 |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |a Kärkkänen, Irina |0 P:(DE-Juel1)142040 |b 0 |e Corresponding Author |u fzj |
| 245 | _ | _ | |a Study of atomic layer deposited ZrO 2 and ZrO 2 /TiO 2 films for resistive switching application |
| 260 | _ | _ | |a Weinheim |c 2014 |b Wiley-VCH |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1403102343_30224 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 520 | _ | _ | |a Thin ZrO2 films and ZrO2/TiO2 bilayers grown by atomic layer deposition (ALD) are integrated into metal–oxide–metal (MOM) structures for investigation of resistive switching (RS) properties. The films have different microstructure depending on the used ALD oxygen source and stacking sequence for the bilayers. Pt/ZrO2/Ti/Pt devices show unipolar RS for oxide thicknesses of 11–18 nm. The devices with O3 grown ZrO2 show higher yield in comparison to the ones with H2O processed oxide. The switching polarity of the Pt/ZrO2/Ti/Pt cells depends on the thickness of the Ti electrode layer. The increase of the Ti layer thickness leads to a change in switching polarity from unipolar to bipolar. The formation of ZrO2/TiO2 bilayers results in changes in the RS behavior of the MOM cells depending on the stacking sequence. |
| 536 | _ | _ | |a 424 - Exploratory materials and phenomena (POF2-424) |0 G:(DE-HGF)POF2-424 |c POF2-424 |f POF II |x 0 |
| 588 | _ | _ | |a Dataset connected to CrossRef, juser.fz-juelich.de |
| 700 | 1 | _ | |a Shkabko, Andrey |0 P:(DE-Juel1)145072 |b 1 |u fzj |
| 700 | 1 | _ | |a Heikkilä, Mikko |0 P:(DE-HGF)0 |b 2 |
| 700 | 1 | _ | |a Niinistö, Jaakko |0 P:(DE-HGF)0 |b 3 |
| 700 | 1 | _ | |a Ritala, Mikko |0 P:(DE-HGF)0 |b 4 |
| 700 | 1 | _ | |a Leskelä, Markku |0 P:(DE-HGF)0 |b 5 |
| 700 | 1 | _ | |a Hoffmann-Eifert, Susanne |0 P:(DE-Juel1)130717 |b 6 |u fzj |
| 700 | 1 | _ | |a Waser, R. |0 P:(DE-Juel1)131022 |b 7 |
| 773 | _ | _ | |a 10.1002/pssa.201330034 |g Vol. 211, no. 2, p. 301 - 309 |0 PERI:(DE-600)1481091-8 |n 2 |p 301 - 309 |t Physica status solidi / A |v 211 |y 2014 |x 1862-6300 |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/154092/files/FZJ-2014-03494.pdf |z Published final document. |y Restricted |
| 909 | C | O | |o oai:juser.fz-juelich.de:154092 |p VDB |
| 910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 7 |6 P:(DE-Juel1)131022 |
| 910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 1 |6 P:(DE-Juel1)145072 |
| 910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 6 |6 P:(DE-Juel1)130717 |
| 910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 7 |6 P:(DE-Juel1)131022 |
| 913 | 2 | _ | |a DE-HGF |b Key Technologies |l Future Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT) |1 G:(DE-HGF)POF3-520 |0 G:(DE-HGF)POF3-524 |2 G:(DE-HGF)POF3-500 |v Controlling Collective States |x 0 |
| 913 | 1 | _ | |a DE-HGF |b Schlüsseltechnologien |1 G:(DE-HGF)POF2-420 |0 G:(DE-HGF)POF2-424 |2 G:(DE-HGF)POF2-400 |v Exploratory materials and phenomena |x 0 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF2 |l Grundlagen zukünftiger Informationstechnologien |
| 914 | 1 | _ | |y 2014 |
| 915 | _ | _ | |a JCR/ISI refereed |0 StatID:(DE-HGF)0010 |2 StatID |
| 915 | _ | _ | |a JCR |0 StatID:(DE-HGF)0100 |2 StatID |
| 915 | _ | _ | |a WoS |0 StatID:(DE-HGF)0110 |2 StatID |b Science Citation Index |
| 915 | _ | _ | |a WoS |0 StatID:(DE-HGF)0111 |2 StatID |b Science Citation Index Expanded |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0150 |2 StatID |b Web of Science Core Collection |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0199 |2 StatID |b Thomson Reuters Master Journal List |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0200 |2 StatID |b SCOPUS |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0300 |2 StatID |b Medline |
| 915 | _ | _ | |a Nationallizenz |0 StatID:(DE-HGF)0420 |2 StatID |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)1040 |2 StatID |b Zoological Record |
| 920 | 1 | _ | |0 I:(DE-Juel1)PGI-7-20110106 |k PGI-7 |l Elektronische Materialien |x 0 |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-7-20110106 |
| 980 | _ | _ | |a UNRESTRICTED |
| Library | Collection | CLSMajor | CLSMinor | Language | Author |
|---|