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000156505 1001_ $$0P:(DE-Juel1)162322$$aZheng, Ying$$b0$$eCorresponding Author$$gfemale$$ufzj
000156505 245__ $$aStructuring and Depth Profiling with an Argon Ion Gun$$f2014-10-31
000156505 260__ $$aJülich$$bForschungszentrum Jülich$$c2014
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000156505 502__ $$aBachelorarbeit, FH Aachen, Campus Jülich, 2014$$bBachelorarbeit$$cFH Aachen, Campus Jülich$$d2014
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