%0 Conference Paper
%A Zhang, B.
%A Yu, W.
%A Zhao, Q.T.
%A Buca, D.
%A Holländer, B.
%A Hartmann, J.M.
%A Zhang, M.
%A Wang, X.
%A Mantl, S.
%T Thermal Stability and Interface Improvement of Thin NiSiGe by C+ ion implantation
%M PreJuSER-15883
%D 2011
%Z Record converted from VDB: 12.11.2012
%< Proceedings. Joint 2011 International Interconnect Technology and materials for Advanced Metallization Conference, 2011
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/15883