TY  - CONF
AU  - Zhang, B.
AU  - Yu, W.
AU  - Zhao, Q.T.
AU  - Buca, D.
AU  - Holländer, B.
AU  - Hartmann, J.M.
AU  - Zhang, M.
AU  - Wang, X.
AU  - Mantl, S.
TI  - Thermal Stability and Interface Improvement of Thin NiSiGe by C+ ion implantation
M1  - PreJuSER-15883
PY  - 2011
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
UR  - https://juser.fz-juelich.de/record/15883
ER  -