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@INPROCEEDINGS{Zhang:15883,
      author       = {Zhang, B. and Yu, W. and Zhao, Q.T. and Buca, D. and
                      Holländer, B. and Hartmann, J.M. and Zhang, M. and Wang, X.
                      and Mantl, S.},
      title        = {{T}hermal {S}tability and {I}nterface {I}mprovement of
                      {T}hin {N}i{S}i{G}e by {C}+ ion implantation},
      reportid     = {PreJuSER-15883},
      year         = {2011},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {Proceedings. Joint 2011 International Interconnect
                      Technology and materials for Advanced Metallization
                      Conference, 2011},
      booktitle     = {Proceedings. Joint 2011 International
                       Interconnect Technology and materials
                       for Advanced Metallization Conference,
                       2011},
      cin          = {JARA-FIT / PGI-9},
      cid          = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-9-20110106},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      url          = {https://juser.fz-juelich.de/record/15883},
}