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| 001 | 15883 | ||
| 005 | 20180208223746.0 | ||
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| 100 | 1 | _ | |a Zhang, B. |0 P:(DE-Juel1)VDB83419 |b 0 |u FZJ |
| 245 | _ | _ | |a Thermal Stability and Interface Improvement of Thin NiSiGe by C+ ion implantation |
| 260 | _ | _ | |c 2011 |
| 295 | 1 | 0 | |a Proceedings. Joint 2011 International Interconnect Technology and materials for Advanced Metallization Conference, 2011 |
| 336 | 7 | _ | |a Contribution to a conference proceedings |0 PUB:(DE-HGF)8 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Contribution to a book |0 PUB:(DE-HGF)7 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Conference Paper |0 33 |2 EndNote |
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| 336 | 7 | _ | |a Output Types/Conference Paper |2 DataCite |
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| 336 | 7 | _ | |a INPROCEEDINGS |2 BibTeX |
| 500 | _ | _ | |3 POF3_Assignment on 2016-02-29 |
| 500 | _ | _ | |a Record converted from VDB: 12.11.2012 |
| 500 | _ | _ | |3 Conference proceedings / Book |
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| 700 | 1 | _ | |a Yu, W. |0 P:(DE-Juel1)VDB69007 |b 1 |u FZJ |
| 700 | 1 | _ | |a Zhao, Q.T. |0 P:(DE-Juel1)VDB97138 |b 2 |u FZJ |
| 700 | 1 | _ | |a Buca, D. |0 P:(DE-Juel1)125569 |b 3 |u FZJ |
| 700 | 1 | _ | |a Holländer, B. |0 P:(DE-Juel1)125595 |b 4 |u FZJ |
| 700 | 1 | _ | |a Hartmann, J.M. |0 P:(DE-HGF)0 |b 5 |
| 700 | 1 | _ | |a Zhang, M. |0 P:(DE-HGF)0 |b 6 |
| 700 | 1 | _ | |a Wang, X. |0 P:(DE-HGF)0 |b 7 |
| 700 | 1 | _ | |a Mantl, S. |0 P:(DE-Juel1)VDB4959 |b 8 |u FZJ |
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| 914 | 1 | _ | |y 2011 |
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