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@INPROCEEDINGS{Knoll:15884,
      author       = {Knoll, L. and Zhao, Q.T. and Luptak, R. and Trellenkamp, S.
                      and Bourdelle, K.K. and Mantl, S.},
      title        = {20nm gate length {S}chottky {MOSFET}s with ultra thin
                      {N}i{S}i/epitaxial {N}i{S}i2 source/drain},
      reportid     = {PreJuSER-15884},
      year         = {2011},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {Proceedings of the 12th International Conference on
                      Ultimate Integration on Silicon (ULIS). - 2011. - S. 38 -
                      41},
      booktitle     = {Proceedings of the 12th International
                       Conference on Ultimate Integration on
                       Silicon (ULIS). - 2011. - S. 38 - 41},
      cin          = {JARA-FIT / PGI-9 / PGI-8},
      cid          = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-9-20110106 /
                      I:(DE-Juel1)PGI-8-20110106},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      url          = {https://juser.fz-juelich.de/record/15884},
}