%0 Conference Paper
%A Nichau, A.
%A Durgun Özben, E.
%A Schnee, M.
%A Lopes, J.M.J.
%A Besmehn, A.
%A Luysberg, M.
%A Knoll, L.
%A Habicht, S.
%A Mussmann, V.
%A Luptak, R.
%A Lenk, St.
%A Rubio-Zuazo, J.
%A Castro, G.R.
%A Buca, D.
%A Zhao, Q.T.
%A Schubert, J.
%A Mantl, S.
%T Lanthanum Lutetium oxide integration in a gate-first process on SOI MOSFETs
%M PreJuSER-15895
%D 2011
%Z Record converted from VDB: 12.11.2012
%< 12 International Conference on Ultimate Integration on Silicon (ULIS)
Y2 14 Mar 2011
M2 Cork, Ireland, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/15895