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@INPROCEEDINGS{Nichau:15895,
      author       = {Nichau, A. and Durgun Özben, E. and Schnee, M. and Lopes,
                      J.M.J. and Besmehn, A. and Luysberg, M. and Knoll, L. and
                      Habicht, S. and Mussmann, V. and Luptak, R. and Lenk, St.
                      and Rubio-Zuazo, J. and Castro, G.R. and Buca, D. and Zhao,
                      Q.T. and Schubert, J. and Mantl, S.},
      title        = {{L}anthanum {L}utetium oxide integration in a gate-first
                      process on {SOI} {MOSFET}s},
      reportid     = {PreJuSER-15895},
      year         = {2011},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {12 International Conference on Ultimate Integration on
                      Silicon (ULIS)},
      booktitle     = {12 International Conference on
                       Ultimate Integration on Silicon (ULIS)},
      month         = {Mar},
      date          = {2011-03-14},
      organization  = {Cork, Ireland, 14 Mar 2011},
      cin          = {JARA-FIT / PGI-9},
      cid          = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-9-20110106},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/15895},
}