%0 Conference Paper
%A Grootoonk, Björn
%A Weigand, Daniel
%A Appenzeller, Wolfgang
%A Meier, Matthias
%T Development of a large area electrode with spatial resolved gas supply and optical access ports for the uniform deposition of silicon thin-films
%M FZJ-2014-06494
%D 2014
%B European Photovoltaic Conference
%C 22 Sep 2014 - 26 Sep 2014, Amsterdam (Netherlands)
Y2 22 Sep 2014 - 26 Sep 2014
M2 Amsterdam, Netherlands
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/173081