TY  - CONF
AU  - Grootoonk, Björn
AU  - Weigand, Daniel
AU  - Appenzeller, Wolfgang
AU  - Meier, Matthias
TI  - Development of a large area electrode with spatial resolved gas supply and optical access ports for the uniform deposition of silicon thin-films
M1  - FZJ-2014-06494
PY  - 2014
T2  - European Photovoltaic Conference
CY  - 22 Sep 2014 - 26 Sep 2014, Amsterdam (Netherlands)
Y2  - 22 Sep 2014 - 26 Sep 2014
M2  - Amsterdam, Netherlands
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/173081
ER  -