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@INPROCEEDINGS{Grootoonk:173081,
      author       = {Grootoonk, Björn and Weigand, Daniel and Appenzeller,
                      Wolfgang and Meier, Matthias},
      title        = {{D}evelopment of a large area electrode with spatial
                      resolved gas supply and optical access ports for the uniform
                      deposition of silicon thin-films},
      reportid     = {FZJ-2014-06494},
      year         = {2014},
      month         = {Sep},
      date          = {2014-09-22},
      organization  = {European Photovoltaic Conference,
                       Amsterdam (Netherlands), 22 Sep 2014 -
                       26 Sep 2014},
      subtyp        = {Other},
      cin          = {IEK-5},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {111 - Thin Film Photovoltaics (POF2-111) / HITEC -
                      Helmholtz Interdisciplinary Doctoral Training in Energy and
                      Climate Research (HITEC) (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF2-111 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)24},
      url          = {https://juser.fz-juelich.de/record/173081},
}