000185630 001__ 185630 000185630 005__ 20240619091123.0 000185630 0247_ $$2Handle$$a2128/9372 000185630 0247_ $$2ISSN$$a1866-1807 000185630 020__ $$a978-3-95806-089-0 000185630 037__ $$aFZJ-2014-07056 000185630 041__ $$aEnglish 000185630 1001_ $$0P:(DE-Juel1)138431$$aPud, Sergii$$b0$$eCorresponding author$$gmale$$ufzj 000185630 245__ $$aSilicon nanowire structures for neuronal cell interfacing$$f2014-09-30 000185630 260__ $$aJülich$$bForschungszentrum Jülich GmbH Zentralbibliothek, Verlag$$c2015 000185630 300__ $$a153 S. 000185630 3367_ $$0PUB:(DE-HGF)11$$2PUB:(DE-HGF)$$aDissertation / PhD Thesis$$bphd$$mphd$$s1447829972_4289 000185630 3367_ $$0PUB:(DE-HGF)3$$2PUB:(DE-HGF)$$aBook$$mbook 000185630 3367_ $$02$$2EndNote$$aThesis 000185630 3367_ $$2DRIVER$$adoctoralThesis 000185630 3367_ $$2BibTeX$$aPHDTHESIS 000185630 3367_ $$2DataCite$$aOutput Types/Dissertation 000185630 3367_ $$2ORCID$$aDISSERTATION 000185630 4900_ $$aSchriften des Forschungszentrums Jülich. Reihe Schlüsseltechnologien / Key Technologies$$v112 000185630 502__ $$aRWTH Aachen, Diss., 2014$$bDr.$$cRWTH Aachen$$d2014 000185630 520__ $$aDuring last decade silicon nanowire (NW) field effect transistors (FETs) attracted considerable attention of researchers as perfect candidates for development of highly sensitive and reliable biosensors, which are compatible with cost-efficient CMOS technology. Recently the liquid-gated FETs were used to demonstrate proof of principle extracellular measurements of neuronal cells action potential, which is of great interest regarding the large variety of applications like monitoring of electrical communication within neuronal networks, transmission paths of ionic channels etc. The NWs are expected to provide an improved contact between neuronal cells and NW surface, which is of crucial importance for signal transduction from the cell to the channel of the NW. However, it is still challenging to establish robust tool for the extracellular monitoring of electrogenic cell activity. One of the important milestones of the research in this area is the signal to-noise ratio (SNR), which determines the detection limit of such type of sensors. Therefore, current work is devoted to design, technology development and fabrication of Si NW FET structures for neuronal cell interfacing and characterizing of their transport properties and reliability utilizing technique of noise spectroscopy. During the work we study the transport properties of single Si NW FET transistors, in order to improve understanding of the factors influencing SNR of the NW biosensors. The results demonstrate modulation effect of the channel current by single trap located in the gate dielectric, which reflects extreme charge sensitivity of the NW FET devices. Arising from these investigations we developed and fabricated the Si NW FET structures based on arrays of 50 NWs connected in parallel. Fabricated liquid-gated NW FET structures are characterized in order to find optimal regimes of operation. The revealed front-backgate coupling effect was used to improve the SNR of the fabricated devices by 50%. According to our measurements, the developed Si NW FET structures meet the requirements needed for extracellular detection of the neuronal cell activity. The interface between neuronal cells and fabricated structures was studied using FIB technique. The results demonstrate that the cells contact NWs without a cleft. 000185630 536__ $$0G:(DE-HGF)POF3-552$$a552 - Engineering Cell Function (POF3-552)$$cPOF3-552$$fPOF III$$x0 000185630 650_7 $$0V:(DE-588b)4012494-0$$2GND$$aDissertation$$xDiss. 000185630 773__ $$y2014 000185630 8564_ $$uhttps://juser.fz-juelich.de/record/185630/files/Schluesseltech_112.pdf$$yOpenAccess 000185630 909CO $$ooai:juser.fz-juelich.de:185630$$pdnbdelivery$$pVDB$$pdriver$$popen_access$$popenaire 000185630 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess 000185630 9141_ $$y2014 000185630 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)138431$$aForschungszentrum Jülich GmbH$$b0$$kFZJ 000185630 9130_ $$0G:(DE-HGF)POF2-453$$1G:(DE-HGF)POF2-450$$2G:(DE-HGF)POF2-400$$aDE-HGF$$bSchlüsseltechnologien$$lBioSoft: Makromolekulare Systeme und biologische Informationsverarbeitung$$vPhysics of the Cell$$x0 000185630 9131_ $$0G:(DE-HGF)POF3-552$$1G:(DE-HGF)POF3-550$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lBioSoft – Fundamentals for future Technologies in the fields of Soft Matter and Life Sciences$$vEngineering Cell Function$$x0 000185630 920__ $$lyes 000185630 9201_ $$0I:(DE-Juel1)ICS-8-20110106$$kICS-8$$lBioelektronik$$x0 000185630 9201_ $$0I:(DE-Juel1)PGI-8-20110106$$kPGI-8$$lBioelektronik$$x1 000185630 9801_ $$aFullTexts 000185630 980__ $$aphd 000185630 980__ $$aVDB 000185630 980__ $$abook 000185630 980__ $$aI:(DE-Juel1)ICS-8-20110106 000185630 980__ $$aI:(DE-Juel1)PGI-8-20110106 000185630 980__ $$aUNRESTRICTED 000185630 981__ $$aI:(DE-Juel1)IBI-3-20200312 000185630 981__ $$aI:(DE-Juel1)PGI-8-20110106