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@PHDTHESIS{Pud:185630,
      author       = {Pud, Sergii},
      title        = {{S}ilicon nanowire structures for neuronal cell
                      interfacing},
      volume       = {112},
      school       = {RWTH Aachen},
      type         = {Dr.},
      address      = {Jülich},
      publisher    = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
      reportid     = {FZJ-2014-07056},
      isbn         = {978-3-95806-089-0},
      series       = {Schriften des Forschungszentrums Jülich. Reihe
                      Schlüsseltechnologien / Key Technologies},
      pages        = {153 S.},
      year         = {2015},
      note         = {RWTH Aachen, Diss., 2014},
      abstract     = {During last decade silicon nanowire (NW) field effect
                      transistors (FETs) attracted considerable attention of
                      researchers as perfect candidates for development of highly
                      sensitive and reliable biosensors, which are compatible with
                      cost-efficient CMOS technology. Recently the liquid-gated
                      FETs were used to demonstrate proof of principle
                      extracellular measurements of neuronal cells action
                      potential, which is of great interest regarding the large
                      variety of applications like monitoring of electrical
                      communication within neuronal networks, transmission paths
                      of ionic channels etc. The NWs are expected to provide an
                      improved contact between neuronal cells and NW surface,
                      which is of crucial importance for signal transduction from
                      the cell to the channel of the NW. However, it is still
                      challenging to establish robust tool for the extracellular
                      monitoring of electrogenic cell activity. One of the
                      important milestones of the research in this area is the
                      signal to-noise ratio (SNR), which determines the detection
                      limit of such type of sensors. Therefore, current work is
                      devoted to design, technology development and fabrication of
                      Si NW FET structures for neuronal cell interfacing and
                      characterizing of their transport properties and reliability
                      utilizing technique of noise spectroscopy. During the work
                      we study the transport properties of single Si NW FET
                      transistors, in order to improve understanding of the
                      factors influencing SNR of the NW biosensors. The results
                      demonstrate modulation effect of the channel current by
                      single trap located in the gate dielectric, which reflects
                      extreme charge sensitivity of the NW FET devices. Arising
                      from these investigations we developed and fabricated the Si
                      NW FET structures based on arrays of 50 NWs connected in
                      parallel. Fabricated liquid-gated NW FET structures are
                      characterized in order to find optimal regimes of operation.
                      The revealed front-backgate coupling effect was used to
                      improve the SNR of the fabricated devices by $50\%.$
                      According to our measurements, the developed Si NW FET
                      structures meet the requirements needed for extracellular
                      detection of the neuronal cell activity. The interface
                      between neuronal cells and fabricated structures was studied
                      using FIB technique. The results demonstrate that the cells
                      contact NWs without a cleft.},
      keywords     = {Dissertation (GND)},
      cin          = {ICS-8 / PGI-8},
      cid          = {I:(DE-Juel1)ICS-8-20110106 / I:(DE-Juel1)PGI-8-20110106},
      pnm          = {552 - Engineering Cell Function (POF3-552)},
      pid          = {G:(DE-HGF)POF3-552},
      typ          = {PUB:(DE-HGF)11 / PUB:(DE-HGF)3},
      url          = {https://juser.fz-juelich.de/record/185630},
}