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@INPROCEEDINGS{Lobe:186124,
      author       = {Lobe, Sandra and Stemme, Florian and Tsai, Chih-Long and
                      Finsterbusch, Martin and Dellen, Christian and Uhlenbruck,
                      Sven and Buchkremer, Hans Peter},
      title        = {{P}hysical vapor deposition of ${L}i_7{L}a_3{Z}r_2{O}_{12}$
                      for all-solid-state {L}i ion batteries},
      reportid     = {FZJ-2015-00212},
      year         = {2014},
      abstract     = {The liquid solvents used as electrolytes in conventional Li
                      ion batteries limit the operating temperature range and
                      cause safety problems due to insufficient electrochemical
                      stability. With purpose to avoid these disadvantages solid
                      electrolytes, like lithium conducting oxides, sulfides or
                      phosphates can be used. A promising oxide is the garnet-like
                      Li7La3Zr2O12 that shows one of the highest total Li ion
                      conductivities (about 10-4 S cm-1 at room temperature) in
                      this class of materials. It also enables a wide application
                      range due to its thermal stability and chemical resistance
                      against possible electrode materials, e.g. metallic
                      Lithium.In order to compensate the lower Li ion conductivity
                      compared to liquid electrolytes current work is focused on
                      thin electrolyte layers. Hence, main research aspect of the
                      presented work is the thin film processing of Li7La3Zr2O12
                      with physical vapor deposition methods, especially RF
                      magnetron sputtering. The growth conditions are optimized
                      with regard to synthesize stoichiometric, crack-free and
                      smooth thin films. Deposition is followed by thermal
                      treatment of the as-grown samples to improve the
                      crystallinity which should in turn improve the Li ion
                      conductivity. The composition, structure and the
                      electrochemical behavior of the resulting thin films are
                      analyzed in order to deposit all-solid-state thin film
                      batteries.},
      month         = {Jun},
      date          = {2014-06-10},
      organization  = {14th International Meeting on Lithium
                       Batteries, Como (Italy), 10 Jun 2014 -
                       14 Jun 2014},
      cin          = {IEK-1},
      cid          = {I:(DE-Juel1)IEK-1-20101013},
      pnm          = {123 - Fuel Cells (POF2-123) / HITEC - Helmholtz
                      Interdisciplinary Doctoral Training in Energy and Climate
                      Research (HITEC) (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF2-123 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)1},
      url          = {https://juser.fz-juelich.de/record/186124},
}